Research Catalog

1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : theme--the quest for semiconductor manufacturing excellence: leading the charge into the 21st century, September 10-12, 1997, Cambridge, Massachusetts : ASMC 97 proceedings.

Title
1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : theme--the quest for semiconductor manufacturing excellence: leading the charge into the 21st century, September 10-12, 1997, Cambridge, Massachusetts : ASMC 97 proceedings.
Author
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (8th : 1997 : Cambridge, Mass.)
Publication
Piscataway, NJ : IEEE Service Center ; Mountain View, CA : SEMI, c1997.

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Details

Additional Authors
  • Institute of Electrical and Electronics Engineers. http://id.loc.gov/authorities/names/n79053217
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
Description
vi, 460 p. : ill.; 28 cm.
Alternative Title
  • 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
  • ASMC 97 proceedings
Subjects
Note
  • "IEEE catalog number 97CH36089"--T.p. verso.
Bibliography (note)
  • Includes bibliographical references.
Additional Formats (note)
  • Also available in an electronic version.
ISBN
  • 0780340507 (softbound)
  • 0780340515 (casebound)
Owning Institutions
Princeton University Library