Research Catalog

Microsystem technology and microrobotics /

Title
Microsystem technology and microrobotics / S. Fatikow, U. Rembold.
Author
Fatikow, S. (Sergej), 1960-
Publication
Berlin ; New York : Springer, c1997.

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TextUse in library TJ163 .F38 1997Off-site

Details

Additional Authors
Rembold, Ulrich.
Description
xii, 408 p. : ill.; 24 cm.
Subject
  • Electromechanical devices > Design and construction
  • Microfabrication
  • Robotics
Bibliography (note)
  • Includes bibliographical references (p. [366]-401) and index.
ISBN
3540606580 (hc : alk. paper)
LCCN
96053992
Owning Institutions
Princeton University Library