Research Catalog
Developments in semiconductor microlithography II : [seminar], April 4-5, 1977, San Jose, California /
- Title
- Developments in semiconductor microlithography II : [seminar], April 4-5, 1977, San Jose, California / James W. Giffin, Bruce Ruff, editors ; presented by the Society of Photo-optical Instrumentation Engineers and the Northern California Microphotomask/Masking Working Group, in cooperation with the International Society for Hybrid Microelectronics.
- Publication
- Bellingham, Wash. : SPIE, c1977.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Use in library | TK7871.85.D493 | Off-site |
Details
- Additional Authors
- Giffin, James W.
- International Society for Hybrid Microelectronics. http://id.loc.gov/authorities/names/n50037241
- Northern California Microphotomask/Masking Working Group. http://id.loc.gov/authorities/names/n80015592
- Ruff, Bruce.
- Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
- Description
- viii, 176 p. : ill.; 28 cm.
- Series Statement
- Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 100
- Subject
- Bibliography (note)
- Includes bibliographical references and indexes.
- ISBN
- 0892521279
- LCCN
- 77154295 //r852
- Owning Institutions
- Princeton University Library