Research Catalog

Stress induced phenomena in metallization : fourth international workshop : Tokyo, Japan : June 1997 /

Title
Stress induced phenomena in metallization : fourth international workshop : Tokyo, Japan : June 1997 / editors, Hidekazu Okabayashi, Shoso Shingubara, Paul S. Ho.
Publication
Woodbury : American Institute of Physics, c1998.

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Details

Additional Authors
  • Ho, P. S.
  • Okabayashi, Hidekazu.
  • Shingūbara, Shōsō.
Description
ix, 519 p. : ill.; 24 cm.
Series Statement
AIP conference proceedings ; 418
Uniform Title
AIP conference proceedings ; no. 418.
Subject
  • Aluminum films > Congresses
  • Metallic films > Congresses
  • Semiconductors > Congresses
  • Thin film devices > Congresses
Note
  • "DOE CONF- 976190"--T.p. verso.
Bibliography (note)
  • Includes bibliographical references and index.
Additional Formats (note)
  • Also available in an electronic version.
ISBN
1563966824 (cloth)
LCCN
97077868
Owning Institutions
Princeton University Library