Research Catalog

Optical microlithography II : technology for the 1980s, March 16-17, 1983, Santa Clara, California /

Title
Optical microlithography II : technology for the 1980s, March 16-17, 1983, Santa Clara, California / Harry L. Stover, chairman/editor ; sponsored by SPIE--The International Society for Optical Engineering in cooperation with National Bureau of Standards ... [et al.].
Publication
Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1983.

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Details

Additional Authors
  • SPIE--the International Society for Optical Engineering. http://id.loc.gov/authorities/names/n78088934
  • Stover, Harry L.
  • United States. National Bureau of Standards. http://id.loc.gov/authorities/names/n79021148
Description
vi, 251 p. : ill. ; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 394
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0892524294
LCCN
83050213
Owning Institutions
Princeton University Library