Research Catalog

Silicon nitride for microelectronic applications

Title
Silicon nitride for microelectronic applications [by] John T. Milek.
Author
Milek, John T. (John Theophil), 1915-1976.
Publication
New York, IFI/Plenum, 1971-72.

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TextUse in library TK3441.S46 M54 pt.2Off-site

Details

Description
2 v. illus.; 28 cm.
Series Statement
Handbook of electronic materials ; v. 3, 6
Uniform Title
  • Handbook of electronic materials ; v. 3.
  • Handbook of electronic materials ; v. 6.
Subject
  • Microelectronics > Materials
  • Silicon nitride
Bibliography (note)
  • Includes bibliographies.
Contents
pt. 1. Preparation and properties -- pt. 2. Applications and devices.
ISBN
0306671034 (v. 1) 0306671069 (v. 2)
LCCN
77023589 //r903
Owning Institutions
Princeton University Library