Research Catalog

Methods of measurement for semiconductor materials, process control, and devices; quarterly report.

Title
Methods of measurement for semiconductor materials, process control, and devices; quarterly report.
Author
United States. National Bureau of Standards. http://id.loc.gov/authorities/names/n79021148
Publication
[Washington, For sale by the Supt. of Docs., U.S. Govt. Print. Off.]

Items in the Library & Off-site

Filter by

4 Items

StatusFormatAccessCall NumberItem Location
TextUse in library 9280.921 Apr.-Jun. 1969Off-site
TextUse in library 9280.921 Jul-Sep. 1968Off-site
TextUse in library 9280.921 Oct.-Dec. 1968Off-site
TextUse in library 9280.921 Oct.-Dec. 1969Off-site

Holdings

Details

Description
v. ill.; 25 cm.
Series Statement
NBS technical note
Alternative Title
Methods of measurement for semiconductor materials, process control, and devices. Quarterly report
Subject
ISSN
0090-8541
LCCN
73642169 //r82
Owning Institutions
Princeton University Library