Research Catalog
1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : theme - semiconductor manufacturing: meeting the challenges of the global marketplace, September 23-25, 1998, Boston, Massachusetts, USA : ASMC 98 proceedings.
- Title
- 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : theme - semiconductor manufacturing: meeting the challenges of the global marketplace, September 23-25, 1998, Boston, Massachusetts, USA : ASMC 98 proceedings.
- Author
- IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (9th : 1998 : Boston, Mass.).
- Publication
- Piscataway, NJ : IEEE Service Center ; Mountain View, Calif. : SEMI, c1998.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Use in library | TK7871.85.I34 1998 | Off-site |
Details
- Additional Authors
- Description
- vi, 482 p. : ill.; 28 cm.
- Alternative Title
- 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
- ASMC 1998 proceedings
- Subjects
- Note
- "IEEE Catalog Number 98CH36168"--T.p. verso.
- Bibliography (note)
- Includes bibliographical references.
- Additional Formats (note)
- Also available in an electronic version.
- ISBN
- 0780343808 (softbound)
- 0780343816 (casebound)
- 0780343824 (microfiche)
- Owning Institutions
- Princeton University Library