Research Catalog

Spectroscopic characterization techniques for semiconductor technology : 9-10 November 1983, Cambridge, Massachusetts /

Title
Spectroscopic characterization techniques for semiconductor technology : 9-10 November 1983, Cambridge, Massachusetts / Fred H. Pollak, Robert S. Bauer, chairmen/editors.
Publication
Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1984.

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Details

Additional Authors
  • Bauer, Robert S.
  • Pollak, Fred H.
  • SPIE--the International Society for Optical Engineering. http://id.loc.gov/authorities/names/n78088934
Description
vi, 203 p. : ill.; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 452
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0892524871
LCCN
83051560
Owning Institutions
Princeton University Library