Research Catalog

Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California /

Title
Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California / Devendra K. Sadana, Carl M. Lampert, chairmen/editors.
Publication
Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1984.

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Details

Additional Authors
  • American Vacuum Society. Electronic Materials and Process Division. http://id.loc.gov/authorities/names/n84123141
  • Lampert, Carl M.
  • SPIE--the International Society for Optical Engineering. http://id.loc.gov/authorities/names/n78088934
  • Sadana, Devendra K.
Description
vi, 147 p. : ill.; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 463
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0892524987
LCCN
84050522
Owning Institutions
Princeton University Library