Research Catalog

Optical microlithography III : technology for the next decade, March 14-15, 1984, Santa Clara, California /

Title
Optical microlithography III : technology for the next decade, March 14-15, 1984, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.
Publication
Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1984.

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Details

Additional Authors
  • International Society for Hybrid Microelectronics. http://id.loc.gov/authorities/names/n50037241
  • Stover, Harry L.
Description
vi, 269 p. : ill. ; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 470
Subject
  • Microelectronics > Congresses
  • Photolithography > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0892525053
LCCN
84050822
Owning Institutions
Princeton University Library