Research Catalog
Silicon micromachining /
- Title
- Silicon micromachining / M. Elwenspoek and H.V. Jansen.
- Author
- Elwenspoek, M. (Miko), 1948-
- Publication
- Cambridge, [England] ; New York : Cambridge University Press, 1998.
Items in the Library & Off-site
Filter by
1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Use in library | TK7871.15.S55 E49 1998 | Off-site |
Details
- Additional Authors
- Jansen, H. V. (Henri V.)
- Description
- xiii, 405 p. : ill.; 26 cm.
- Series Statement
- Cambridge studies in semiconductor physics and microelectronic engineering ; 7
- Subjects
- Bibliography (note)
- Includes bibliographical references.
- ISBN
- 052159054X (hb)
- LCCN
- 97043732
- Owning Institutions
- Princeton University Library