Research Catalog

Silicides for VLSI applications /

Title
Silicides for VLSI applications / S.P. Murarka.
Author
Murarka, S. P.
Publication
Orlando : Academic Press, 1983.

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TextUse in library TK7871.15.S54 M87 1983Off-site

Details

Description
xi, 200 p. : ill.; 24 cm.
Alternative Title
Silicides for V.L.S.I. applications.
Subject
  • Electronics > Materials
  • Integrated circuits > Very large scale integration
  • Silicides
Note
  • Includes indexes.
Bibliography (note)
  • Bibliography: p. 177-186.
ISBN
0125112203
LCCN
82016414
Owning Institutions
Princeton University Library