Research Catalog

Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California /

Title
Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California / Larry F. Thompson, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.
Publication
Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1985.

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Details

Additional Authors
  • International Society for Hybrid Microelectronics. http://id.loc.gov/authorities/names/n50037241
  • Thompson, L. F., 1944-
Description
vi, 350 p. : ill.; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 539
Subject
  • Integrated circuits > Congresses
  • Lithography, Electron beam > Congresses
  • Photoresists > Congresses
Bibliography (note)
  • Includes bibliographies and index.
ISBN
0892525746
LCCN
85050710
Owning Institutions
Princeton University Library