Research Catalog

Optical microlithography IV : March 13-14, 1985, Santa Clara, California /

Title
Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.
Publication
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1985.

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Details

Additional Authors
  • International Society for Hybrid Microelectronics. http://id.loc.gov/authorities/names/n50037241
  • SPIE--the International Society for Optical Engineering. http://id.loc.gov/authorities/names/n78088934
  • Stover, Harry L.
Description
vi, 260 p. : ill.; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 538
Alternative Title
  • Optical microlithography 4.
  • Optical microlithography four.
Subjects
Bibliography (note)
  • Includes bibliographies and index.
ISBN
0892525378 (canceled/invalid)
LCCN
85061232
Owning Institutions
Princeton University Library