Research Catalog

Microelectronics processing : inorganic materials characterization /

Title
Microelectronics processing : inorganic materials characterization / Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society.

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StatusFormatAccessCall NumberItem Location
TextUse in library TK7874 .M486 1986Off-site

Details

Additional Authors
  • American Chemical Society. Division of Industrial and Engineering Chemistry. http://id.loc.gov/authorities/names/n79059559
  • Casper, L. A.
Description
x, 443 p. : ill.; 24 cm.
Subject
Microelectronics > Materials > Congresses
ISBN
0841209340
LCCN
85030648
Owning Institutions
Princeton University Library