Research Catalog

Silicon-on-insulator : its technology and applications /

Title
Silicon-on-insulator : its technology and applications / edited by S. Furukawa.
Publication
Tokyo : KTK Scientific Publishers ; Dordrecht [Netherlands] ; Boston : Reidel ; Hingham, MA, U.S.A. : Distributed in the U.S.A. and Canada by Kluwer, c1985.

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TextUse in library TK7871.85 .S548 1985Off-site

Details

Additional Authors
  • Furukawa, S. (Seijirō), 1934-
  • National Science Foundation (U.S.) http://id.loc.gov/authorities/names/n79005681
  • Nihon Gakujutsu Shinkōkai. http://id.loc.gov/authorities/names/n79079558
  • US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics" (1983 : Ōiso-machi, Japan)
Description
viii, 295 p. : ill.; 24 cm.
Series Statement
ASST, advances in solid state technology ; 1
Uniform Title
Layered structures and interface kinetics.
Subjects
Note
  • "Papers presented during the US-Japan Seminar on "Solid Phase Epitaxy and Interface Kinetics" held in Oiso, Japan, June 20-24, 1983 ... co-sponsored by National Science Foundation and Japan Society for the Promotion of Science"--Pref.
  • Companion volume containing the other papers presented at seminar published under title: Layered structures and interface kinetics.
ISBN
9027719403
LCCN
84027751
Owning Institutions
Princeton University Library