Research Catalog

Silicon processing for the VLSI era /

Title
Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber.
Author
Wolf, Stanley, 1943-
Publication
Sunset Beach, Calif. : Lattice Press, c2000-

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TextUse in library TK7874 .W635 2000 vol. 1Off-site

Details

Additional Authors
Tauber, Richard N.
Description
v. : ill.; 25 cm.
Subject
  • Integrated circuits > Very large scale integration
  • Silicon
Bibliography (note)
  • Includes bibliographies and indexes.
Contents
v. 1. Process technology -- v. 2. Process integration -- v. 3. The submicron MOSFET.
ISBN
  • 0961672161 (v. 1)
  • 0961672145 (v. 2)
  • 0961672153 (v. 3)
Owning Institutions
Princeton University Library