Research Catalog

Electron-beam, X-ray, and ion-beam lithographies VI : 5-6 March 1987, Santa Clara, California /

Title
Electron-beam, X-ray, and ion-beam lithographies VI : 5-6 March 1987, Santa Clara, California / Phillip D. Blais, chair/editor.

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Details

Additional Authors
Blais, Phillip D.
Description
vi, 265 p. : ill.; 28 cm.
Subject
  • Ion beam lithography > Congresses
  • Lithography, Electron beam > Congresses
  • Microlithography > Congresses
  • X-ray lithography > Congresses
ISBN
0892528087
LCCN
87060741
Owning Institutions
Princeton University Library