Research Catalog

Electron-beam technology in microelectronic fabrication /

Title
Electron-beam technology in microelectronic fabrication / edited by George R. Brewer.
Publication
New York : Academic Press, 1980.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
Not available - Please for assistance.
TextUse in library TK7874 .E48Off-site

Details

Additional Authors
Brewer, George Raymond, 1922-
Description
xi, 362 p. : ill.; 24 cm.
Subject
  • Lithography, Electron beam
  • Microelectronics
Bibliography (note)
  • Includes bibliographies and index.
ISBN
012133550X :
LCCN
79008856
Owning Institutions
Princeton University Library