Research Catalog
Semiconductor microlithography V /
- Title
- Semiconductor microlithography V / Jim Dey, editor ; presented by the Society of Photo-optical Instrumentation Engineers in cooperation with the Northern California Microphotomask/Masking Working Group and the International Society for Hybrid Microelectronics, March 17-18, 1980, San Jose, California.
- Publication
- Bellingham, Wash. : SPIE, 1980.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Use in library | TK7871.85 .S465 | Off-site |
Details
- Additional Authors
- Dey, Jim.
- International Society for Hybrid Microelectronics. http://id.loc.gov/authorities/names/n50037241
- Northern California Microphotomask/Masking Working Group. http://id.loc.gov/authorities/names/n80015592
- Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
- Description
- viii, 204 p. : ill.; 28 cm.
- Series Statement
- Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 221
- Society of Photo-optical Instrumentation Engineers. Proceedings ; v. 221.
- Subjects
- Bibliography (note)
- Includes bibliographical references and indexes.
- ISBN
- 089252250X (pbk.)
- LCCN
- 80050727
- Owning Institutions
- Princeton University Library