Research Catalog

Modern optical characterization techniques for semiconductors and semiconductor devices /

Title
Modern optical characterization techniques for semiconductors and semiconductor devices / O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.

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Details

Additional Authors
  • Glembocki, O. J.
  • Metallurgical Society (U.S.) http://id.loc.gov/authorities/names/n86031735
  • Pollak, Fred H.
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
  • Song, J. J.
Description
vi, 282 p. : ill.; 28 cm.
Subject
  • Thin film devices > Congresses
  • Thin films > Optical properties > Congresses
ISBN
089252829X (pbk.)
LCCN
87061007
Owning Institutions
Princeton University Library