Research Catalog

Proceedings of the Symposium on Silicon Nitride Thin Insulating Films /

Title
Proceedings of the Symposium on Silicon Nitride Thin Insulating Films / edited by Vikram J. Kapoor, Herman J. Stein ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.
Author
Symposium on Silicon Nitride Thin Insulating Films (1983 : San Francisco, Calif.)
Publication
Pennington, N.J. (10 S. Main St., Pennington 08534-2696) : Electrochemical Society, c1983.

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Details

Additional Authors
  • Electrochemical Society. Dielectrics and Insulation Division. http://id.loc.gov/authorities/names/n79124668
  • Electrochemical Society. Electronics Division. http://id.loc.gov/authorities/names/n79124670
  • Kapoor, Vikram J.
  • Stein, Herman J.
Description
ix, 519 p. : ill.; 23 cm.
Series Statement
Proceedings ; v. 83-8
Uniform Title
Proceedings (Electrochemical Society) ; v. 83-8.
Subject
  • Silicon nitride > Congresses
  • Thin film devices > Congresses
Note
  • Papers presented at the symposium held May 11-13, 1983 in San Francisco, Calif.
Bibliography (note)
  • Includes bibliographical references and index.
LCCN
83082039
Owning Institutions
Princeton University Library