Research Catalog

Laser chemical processing of semiconductor devices : proceedings of Symposium B, 1984 Fall Meeting of the Materials Research Society, November 27-29, 1984, Boston Marriott Hotel at Copley Place, Boston, Massachusetts : extended abstracts

Title
Laser chemical processing of semiconductor devices : proceedings of Symposium B, 1984 Fall Meeting of the Materials Research Society, November 27-29, 1984, Boston Marriott Hotel at Copley Place, Boston, Massachusetts : extended abstracts / edited by F.A. Houle, T.F. Deutsch, R.M. Osgood, Jr. ; pricipal symposium support, Air Force Office of Scientific Research , Army Research Office, Office of Naval Research ; supplement support, IBM Corporation, Lambda Physik, LASERTECHNICS.
Author
Materials Research Society. Meeting (1984 : Boston, Mass.). Symposium B.
Publication
Pittsburgh, Pa. : Materials Research Society, c1984.

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Details

Additional Authors
  • Houle, F. A.
  • Deutsch, T. F.
  • Osgood, R. M.
  • United States. Air Force. Office of Scientific Research
Description
viii, 136 p. : ill.; 23 cm.
Alternative Title
Extended abstracts.
Subjects
Bibliography (note)
  • Includes bibliographies and index.
OCLC
  • 18751800
  • SCSB-1709379
Owning Institutions
Princeton University Library