Research Catalog

Plasma processing : proceedings of the Symposium on Plasma Etching and Deposition /

Title
Plasma processing : proceedings of the Symposium on Plasma Etching and Deposition / edited by R.G. Frieser, C.J. Mogab ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.
Author
Symposium on Plasma Etching and Deposition (1980 : Hollywood, Fla.)

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TextUse in library TK7871.85.S973 1980Off-site

Details

Additional Authors
  • Electrochemical Society. Dielectrics and Insulation Division. (uri)http://id.loc.gov/authorities/names/n79124668
  • Electrochemical Society. Electronics Division. (uri)http://id.loc.gov/authorities/names/n79124670
  • Frieser, R. G.
  • Mogab, C. J.
Description
x, 336 p. : ill.; 23 cm.
Series Statement
Proceedings / Electrochemical Society ; v. 81-1
Subject
  • Plasma etching > Congresses
  • Semiconductors > Etching > Congresses
LCCN
81065237//r852
Owning Institutions
Princeton University Library