Research Catalog
Polymers in microlithography : materials and processes /
- Title
- Polymers in microlithography : materials and processes / Elsa Reichmanis, Scott A. MacDonald, Takao Iwayanagi.
- Publication
- Washington, D.C. : American Chemical Society, 1989.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Not available - Please for assistance. | Text | Use in library | TK7871.15.P6 P635 1989 | Off-site |
Details
- Additional Authors
- Description
- xii, 449 p. : ill.; 24 cm.
- Series Statement
- ACS symposium series, 0097-6156 ; 412
- Subjects
- Note
- Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989.
- Bibliography (note)
- Includes bibliographical references and indexes.
- ISBN
- 0841217017
- LCCN
- 89017931
- Owning Institutions
- Princeton University Library