Research Catalog

Polymers in microlithography : materials and processes /

Title
Polymers in microlithography : materials and processes / Elsa Reichmanis, Scott A. MacDonald, Takao Iwayanagi.
Publication
Washington, D.C. : American Chemical Society, 1989.

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Details

Additional Authors
  • American Chemical Society. Division of Polymeric Materials: Science and Engineering. http://id.loc.gov/authorities/names/n82211690
  • Iwayanagi, Takao, 1949-
  • MacDonald, Scott A.
  • Reichmanis, Elsa, 1953-
Description
xii, 449 p. : ill.; 24 cm.
Series Statement
ACS symposium series, 0097-6156 ; 412
Subjects
Note
  • Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989.
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
0841217017
LCCN
89017931
Owning Institutions
Princeton University Library