Research Catalog

Monitoring and control of plasma-enhanced processing of semiconductors : 1-2 November 1988, Santa Clara, California /

Title
Monitoring and control of plasma-enhanced processing of semiconductors : 1-2 November 1988, Santa Clara, California / James E. Griffiths, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, c1989.

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Details

Additional Authors
  • Griffiths, James E.
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
viii, 147 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 1037
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1037.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819400726 (pbk.)
LCCN
88063652
Owning Institutions
Princeton University Library