Research Catalog
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices /
- Title
- Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / Ungyu Paik, Jea-Gun Park.
- Author
- Paik, Ungyu.
- Publication
- Boca Raton, FL : CRC Press/Taylor & Francis Group, c2009.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Use in library | TK7874.84 .P35 2009 | Off-site |
Details
- Additional Authors
- Park, Jea-Gun.
- Description
- xiii, 191 p., [14] p. of plates : ill. (some col.); 25 cm.
- Subjects
- Bibliography (note)
- Includes bibliographical references (p. 171-175) and index.
- ISBN
- 9781420059113 (hardcover : alk. paper)
- 1420059114 (hardcover : alk. paper)
- LCCN
- 2008051282
- Owning Institutions
- Princeton University Library