Research Catalog

Deposition and growth : limits for microelectronics, Anaheim, CA, 1987

Title
Deposition and growth : limits for microelectronics, Anaheim, CA, 1987 / editor, G.W. Rubloff.
Publication
New York : American Institute of Physics, 1988.

Available Online

http://scitation.aip.org/content/aip/proceeding/aipcp/167

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Details

Additional Authors
  • Rubloff, G. W. (Gary W.)
  • American Institute of Physics
Description
388 p. : ill.; 25 cm.
Series Statement
  • American Vacuum Society series ; 4
  • American Institute of Physics conference proceedings ; no. 167
Uniform Title
AIP conference proceedings ; no. 167.
Subject
  • Thin films > Congresses
  • Microelectronics > Materials > Congresses
Bibliography (note)
  • Includes bibliographies and index.
Additional Formats (note)
  • Also available in an electronic version.
ISBN
0883183676
LCCN
88071432
OCLC
  • 18610175
  • SCSB-1747616
Owning Institutions
Princeton University Library