Research Catalog
Optical microlithography and metrology for microcircuit fabrication : ECO2, 27-28 April 1989, Paris, France /
- Title
- Optical microlithography and metrology for microcircuit fabrication : ECO2, 27-28 April 1989, Paris, France / Michel J. Lacombat, Steve Wittekoek, chairs/editors ; the Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering ; cooperating organizations, ANRT Association nationale de la recherche technique ... [et al.].
- Author
- European Congress on Optics (2nd : 1989 : Paris, France)
- Publication
- Bellingham, Wash., USA : SPIE, c1989.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Use in library | TK7874 .E26 1989 | Off-site |
Details
- Additional Authors
- Association nationale de la recherche technique. http://id.loc.gov/authorities/names/n50054575
- European Federation for Applied Optics. http://id.loc.gov/authorities/names/n88212131
- European Physical Society. http://id.loc.gov/authorities/names/n79046065
- Lacombat, Michel J.
- Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
- Wittekoek, Steve.
- Description
- vii, 206 p. : ill.; 28 cm.
- Series Statement
- SPIE proceedings series ; v. 1138
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 1138.
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 0819401749
- LCCN
- 89062616
- Owning Institutions
- Princeton University Library