Research Catalog
Surface and interface analysis of microelectronic materials processing and growth : 12-13 October 1989, Santa Clara, California
- Title
- Surface and interface analysis of microelectronic materials processing and growth : 12-13 October 1989, Santa Clara, California / Leonard J. Brillson, Fred H. Pollak, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations: Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH.
- Publication
- Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1990.
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Details
- Additional Authors
- Description
- vi, 201 p. : ill.; 28 cm.
- Series Statement
- SPIE proceedings series ; vol. 1186
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 1186.
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 0819402222
- LCCN
- 89043522
- OCLC
- 21282100
- SCSB-1909241
- Owning Institutions
- Princeton University Library