Research Catalog
Lithography : main techniques /
- Title
- Lithography : main techniques / edited by Stefan Landis.
- Publication
- London : ISTE ; Hoboken, NJ : Wiley, 2011.
- Supplementary Content
- Cover image
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Use in library | TK7872.M3 L58 2011 | Off-site |
Details
- Additional Authors
- Landis, Stefan.
- Description
- xxv, 377 p. : ill.; 25 cm.
- Summary
- "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 9781848212022 (hardback)
- 184821202X (hardback)
- LCCN
- 2010040731
- Owning Institutions
- Princeton University Library