Research Catalog

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '91 proceedings : October 21-23, 1991, Boston, Massachusetts.

Title
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '91 proceedings : October 21-23, 1991, Boston, Massachusetts.
Author
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (2nd : 1991 : Boston, Mass.)

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TextUse in library TK7871.85 .I34 1991Off-site

Details

Additional Authors
  • Institute of Electrical and Electronics Engineers. http://id.loc.gov/authorities/names/n79053217
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
Description
x, 212 p. : ill.; 28 cm.
Subjects
ISBN
  • 0780301528 (pbk)
  • 0780301536 (case)
LCCN
91072812
Owning Institutions
Princeton University Library