Research Catalog

Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey

Title
Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey / Orest J. Glembocki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, c1992.

Available Online

http://proceedings.spiedigitallibrary.org/volume.aspx?volume=1678

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Details

Additional Authors
  • Glembocki, O. J.
  • Society of Photo-optical Instrumentation Engineers
Description
ix, 308 p. : ill.; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering, 0277-786X ; v. 1678
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1678.
Subject
  • Semiconductors > Testing > Congresses
  • Spectrum analysis > Congresses
Bibliography (note)
  • Includes bibliographies and index.
ISBN
0819408395
LCCN
92081135
OCLC
  • 26322290
  • SCSB-1951531
Owning Institutions
Princeton University Library