Research Catalog

Lasers in microelectronic manufacturing : 10-11 September 1991, San Jose, California

Title
Lasers in microelectronic manufacturing : 10-11 September 1991, San Jose, California / Bodil Braren, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash. : SPIE, c1991.

Available Online

http://proceedings.spiedigitallibrary.org/volume.aspx?volume=1598

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Details

Additional Authors
  • Braren, Bodil
  • Society of Photo-optical Instrumentation Engineers
Description
vii, 240 p. : ill.; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 1598
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1598.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819407291 (pbk.)
LCCN
91067489
OCLC
  • 25381852
  • SCSB-1966340
Owning Institutions
Princeton University Library