Research Catalog

Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Title
Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
Author
National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems. (uri)http://id.loc.gov/authorities/names/n92090104

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
TextUse in library TK7836.N37 1992Off-site

Details

Description
xii, 89 p. : ill; 28 cm.
Subjects
ISBN
0309046351
LCCN
92060205
Owning Institutions
Princeton University Library