Research Catalog
12th annual Symposium on Photomask Technology and Management : proceedings : 23-24 September 1992, Sunnyvale, California /
- Title
- 12th annual Symposium on Photomask Technology and Management : proceedings : 23-24 September 1992, Sunnyvale, California / sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology.
- Author
- Symposium on Photomask Technology and Management (12th : 1992 : Sunnyvale, Calif.)
- Publication
- Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1993.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Use in library | TK7874 .S9434 1992 | Off-site |
Details
- Additional Authors
- BACUS (Technical group) http://id.loc.gov/authorities/names/n92089299
- Description
- ix, 286 p. : ill.; 28 cm.
- Series Statement
- SPIE proceedings series ; v. 1809
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 1809.
- Alternative Title
- Twelfth annual Symposium on Photomask Technology and Management.
- Subjects
- Bibliography (note)
- Includes bibliographical references and index.
- Additional Formats (note)
- Also available in an electronic version.
- ISBN
- 0819410098
- LCCN
- 92062651
- Owning Institutions
- Princeton University Library