Research Catalog

The Physics and chemistry of SiO₂ and the Si-SiO₂ interface 2 /

Title
The Physics and chemistry of SiO₂ and the Si-SiO₂ interface 2 / edited by C. Robert Helms and Bruce E. Deal.
Publication
New York : Plenum Press, c1993.

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StatusFormatAccessCall NumberItem Location
TextUse in library QC585.75.S55 P48 1993Off-site

Details

Additional Authors
  • Deal, Bruce E.
  • Electrochemical Society. Dielectric Science and Technology Division. http://id.loc.gov/authorities/names/n91001217
  • Electrochemical Society. Electronics Division. http://id.loc.gov/authorities/names/n79124670
  • Helms, C. Robert.
  • Symposium on the Physics and Chemistry of the SiO₂ and Si-SiO₂ Interface (2nd : 1992 : St. Louis, Mo.)
Description
xvi, 503 p. : ill.; 26 cm.
Subjects
Note
  • Proceedings of the Second Symposium on the Physics and Chemistry of the SiO₂ and Si-SiO₂ Interface, held May 18-21, 1992, in St. Louis, Missouri, sponsored by the Electronics Division and the Dielectric Science and Technology Division of the Electrochemical Society.
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
0306444194
LCCN
93014058
Owning Institutions
Princeton University Library