Research Catalog

Metallization : theory and practice for VLSI and ULSI /

Title
Metallization : theory and practice for VLSI and ULSI / Shyam P. Murarka.
Author
Murarka, S. P.
Publication
Boston Butterworth-Heinemann, c1993.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
Not available - Please for assistance.
TextUse in library TK7874 .M868 1993Off-site

Details

Description
vi, 250 p. : ill.; 26 cm.
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0750690011 (acid-free paper)
LCCN
92033603
Owning Institutions
Princeton University Library