Research Catalog

Integrated circuit metrology, inspection, and process control VIII : 28 February-2 March, San Jose, California /

Title
Integrated circuit metrology, inspection, and process control VIII : 28 February-2 March, San Jose, California / Marylyn Hoy Bennett, chair/editor ; sponsored and published by SPIE-the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.

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Details

Additional Authors
  • Bennett, Marylyn Hoy.
  • Semiconductor Equipment and Materials International. (uri)http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. (uri)http://id.loc.gov/authorities/names/n78088934
Description
ix, 553 p. : ill.; 28 cm.
Series Statement
SPIE Proceedings ; v. 2196.
Subjects
ISBN
0819414913
LCCN
94065791
Owning Institutions
Princeton University Library