Research Catalog

Optical/laser microlithography VII : 2-4 March 1994, San Jose, California /

Title
Optical/laser microlithography VII : 2-4 March 1994, San Jose, California / Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.

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Details

Additional Authors
  • Brunner, Timothy A.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
xiii, 1008 p. : ill.; 28 cm.
Series Statement
SPIE proceedings, 0277-786X ; . 2197
Subjects
ISBN
0819414921
LCCN
94065792
Owning Institutions
Princeton University Library