Research Catalog
Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG /
- Title
- Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG / Wolfgang Karthe, chair/editor ; sponsored by the Commission of the European Communities, Directorate General for Science, Research, and Development, the European Optical Society (EOS), SPIE-the International Society for Optical Engineering.
- Publication
- Bellingham, Wash. : SPIE, c1994.
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Status | Format | Access | Call Number | Item Location |
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Not available - Please for assistance. | Text | Use in library | TA1750 .N366 1994 | Off-site |
Details
- Additional Authors
- Commission of the European Communities. Directorate-General for Science, Research, and Development. http://id.loc.gov/authorities/names/n83021368
- European Optical Society. http://id.loc.gov/authorities/names/n92062713
- Karthe, Wolfgang.
- Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
- Description
- ix, 334 p. : ill.; 28 cm.
- Series Statement
- Europto series
- SPIE proceedings series ; vol. 2213
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 2213.
- Subjects
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 0819415170
- LCCN
- 94065766
- Owning Institutions
- Princeton University Library