Research Catalog

Advanced metallization for ULSI applications in 1993 : proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. /

Title
Advanced metallization for ULSI applications in 1993 : proceedings of the conference held October 5-7, 1993, San Diego, California, U.S.A., and October 26-27, 1993, Tokyo, Japan sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley, U.S.A. / editors, David P. Favreau, Yosi Shacham-Diamand, Yasuhiro Horiike.
Publication
Pittsburgh, PA : Materials Research Society, c1994.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
Not available - Please for assistance.
TextUse in library TK7871.15.F5 A383 1994Off-site

Details

Additional Authors
  • Favreau, David P.
  • Horiike, Yasuhiro.
  • Shacham-Diamand, Yosi.
  • University of California, Berkeley. Continuing Education in Engineering. http://id.loc.gov/authorities/names/n83302700
Description
xv, 611 p. : ill.; 24 cm.
Series Statement
Materials Research Society conference proceedings, 1048-0854
Subjects
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1558992359
LCCN
94000675 //r94
Owning Institutions
Princeton University Library