Research Catalog

Optical microlithography : technology for the mid-1980s : March 31-April 1, 1982, Santa Clara, California /

Title
Optical microlithography : technology for the mid-1980s : March 31-April 1, 1982, Santa Clara, California / Harry L. Stover, chairman-editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society.
Publication
Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1982.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
Not available - Please for assistance.
TextUse in library TK7874 .O67Off-site

Details

Additional Authors
  • International Society for Hybrid Microelectronics. http://id.loc.gov/authorities/names/n50037241
  • Materials Research Society. http://id.loc.gov/authorities/names/n79060208
  • Northern California Microphotomask/Masking Working Group. http://id.loc.gov/authorities/names/n80015592
  • Stover, Harry L.
Description
viii, 265 p. : ill. ; 28 cm.
Series Statement
Proceedings of SPIE--the International Society for Optical Engineering ; v. 334
Subject
  • Microelectronics > Congresses
  • Photolithography > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0892523697 (canceled/invalid)
LCCN
82060282
Owning Institutions
Princeton University Library