Research Catalog

IEEE/SEMI 1994 Advanced Semiconductor Manufacturing Conference and Workshop : theme--manufacturing exellence, a global challenge : ASMC '94 proceedings, November 14-16, 1994, Cambridge, Massachusetts.

Title
IEEE/SEMI 1994 Advanced Semiconductor Manufacturing Conference and Workshop : theme--manufacturing exellence, a global challenge : ASMC '94 proceedings, November 14-16, 1994, Cambridge, Massachusetts.
Author
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (5th : 1994 : Cambridge, Mass.)
Publication
New York : Institute of Electrical and Electronics Engineers, c1994.

Available Online

http://ieeexplore.ieee.org/servlet/opac?punumber=4557

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Details

Additional Authors
  • Semiconductor Equipment and Materials International
  • Institute of Electrical and Electronics Engineers
Description
vi, 335 p. : ill.; 28 cm.
Alternative Title
  • 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop
  • Theme--manufacturing excellence, a global challenge
  • ASMC '94 proceedings
Subjects
Note
  • "IEEE catalog number 94CH3475-1"--Label on t.p. verso.
Bibliography (note)
  • Includes bibliographical references.
Additional Formats (note)
  • Also available in an electronic version.
ISBN
  • 0780320530 (pbk)
  • 0780320549 (case)
  • 0780320557 (microfiche)
LCCN
94077546
OCLC
  • 32248573
  • SCSB-2047388
Owning Institutions
Princeton University Library