Research Catalog

Integrated circuit metrology, inspection, and process control IX : 20-22 February, Santa Clara, California /

Title
Integrated circuit metrology, inspection, and process control IX : 20-22 February, Santa Clara, California / Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE-the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
Not available - Please for assistance.
TextUse in library TK7874 .I54689 1995Off-site

Details

Additional Authors
  • Bennett, Marylyn Hoy.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
xi, 514 p. : ill.; 28 cm.
Series Statement
SPIE Proceedings ; v. 2439.
Subjects
ISBN
0819417874
LCCN
94069902
Owning Institutions
Princeton University Library