Research Catalog

Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California /

Title
Advances in resist technology and processing XII : 20-22 February 1995, Santa Clara, California / Robert D. Allen, chair/editor : sponsored and published by SPIE--the International Society for Optical Engineering ; cooperationg organization SEMI--Semiconductor Equipment and Materials International.

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Details

Additional Authors
  • Allen, Robert D.
  • Semiconductor Equipment and Materials International. http://id.loc.gov/authorities/names/n90682619
  • Society of Photo-optical Instrumentation Engineers. http://id.loc.gov/authorities/names/n78088934
Description
xiii, 904 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; v. 2438
Subject
ISBN
0819417866
LCCN
94069901
Owning Institutions
Princeton University Library