Research Catalog
Electron-beam sources and charged-particle optics : 10-14 July 1995, San Diego, California
- Title
- Electron-beam sources and charged-particle optics : 10-14 July 1995, San Diego, California / Eric Munro, Henry P. Freund, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
- Publication
- Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1995.
Items in the Library & Off-site
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1 Item
Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Use in library | QC793.5.E62 E432 1995 | Off-site |
Details
- Additional Authors
- Description
- x, 536 pages : illustrations; 28 cm
- Series Statement
- SPIE proceedings series ; v. 2522
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 2522.
- Alternative Title
- Charged-particle optics.
- Electron-beam sources of high-brightness radiation.
- Subject
- Genre/Form
- Conference papers and proceedings.
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- Charged-particle optics: Electron-beam lithography ; Aberration theory and analysis ; Optimization and simulation software ; Sources ; Electron-optical design ; Multipole lenses, energy analyzers, filters and sector magnets ; Coulomb interactions and space charge ; Focused ion beams -- Electron-beam sources of high-brightness radiation: Experimental sources ; User facilities ; Theory ; Electron-beam sources.
- ISBN
- 0819418811
- 9780819418814
- LCCN
- 95068536
- OCLC
- ocm33500768
- 33500768
- SCSB-2066595
- Owning Institutions
- Princeton University Library