Research Catalog

Electron-beam sources and charged-particle optics : 10-14 July 1995, San Diego, California

Title
Electron-beam sources and charged-particle optics : 10-14 July 1995, San Diego, California / Eric Munro, Henry P. Freund, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1995.

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Details

Additional Authors
  • Munro, Eric.
  • Freund, H. P. (Henry P.)
  • Society of Photo-Optical Instrumentation Engineers.
Description
x, 536 pages : illustrations; 28 cm
Series Statement
SPIE proceedings series ; v. 2522
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2522.
Alternative Title
  • Charged-particle optics.
  • Electron-beam sources of high-brightness radiation.
Subject
  • Electron beams > Congresses
  • Ion sources > Congresses
  • Electron optics > Congresses
  • Electron beams
  • Electron optics
  • Ion sources
Genre/Form
Conference papers and proceedings.
Bibliography (note)
  • Includes bibliographical references and index.
Contents
Charged-particle optics: Electron-beam lithography ; Aberration theory and analysis ; Optimization and simulation software ; Sources ; Electron-optical design ; Multipole lenses, energy analyzers, filters and sector magnets ; Coulomb interactions and space charge ; Focused ion beams -- Electron-beam sources of high-brightness radiation: Experimental sources ; User facilities ; Theory ; Electron-beam sources.
ISBN
  • 0819418811
  • 9780819418814
LCCN
95068536
OCLC
  • ocm33500768
  • 33500768
  • SCSB-2066595
Owning Institutions
Princeton University Library