Research Catalog

Micromachined devices and components : 23-24 October, 1995, Austin, Texas

Title
Micromachined devices and components : 23-24 October, 1995, Austin, Texas / Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, c1995.

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Details

Additional Authors
  • Roop, Ray.
  • Chau, Kevin.
  • Society of Photo-Optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
  • National Institute of Standards and Technology (U.S.)
Description
ix, 296 p. : ill.; 28 cm.
Series Statement
SPIE proceedings series ; v. 2642
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2642.
Subject
  • Microelectronics > Congresses
  • Actuators > Congresses
  • Detectors > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819420085
LCCN
95070377
OCLC
  • ocm33474557
  • SCSB-2067232
Owning Institutions
Princeton University Library