Research Catalog

Handbook of thin film process technology

Title
Handbook of thin film process technology / Editors: David A. Glocker, S. Ismat Shah.
Publication
Bristol, UK ; Philadelphia, PA : Institute of Physics Publishing, 1995.

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TextUse in library TK7871.15.F5 H342 1995q OversizeOff-site

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Details

Additional Authors
  • Glocker, David A.
  • Shah, S. Ismat.
Description
1 v. (various pagings) : ill.; 31 cm.
Subject
  • Thin films
  • Molecular beam epitaxy
  • Chemical vapor deposition
  • Sputtering (Physics)
  • Materials
Note
  • Loose-leaf for updating.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0750303115
OCLC
  • ocm33093216
  • SCSB-2071946
Owning Institutions
Princeton University Library